Metal vapor vacuum arc ion source

Magnetic properties of nanoclusters formed by implantation of Fe into Ge using a metal-vapor vacuum arc ion source

The magnetic properties of Fe ions implanted into a germanium crystal by metal-vapor vacuum arc ion source were investigated using a Quantum Design SQUID magnetometer. The presence of Fe nanoclusters in Ge was verified by magnetization measurements. A Langevin fit was used to obtain the size distribution of the clusters. The results demonstrated that the clusters are magnetic. The magnetic beha...

An interchangeable-cathode vacuum arc plasma source.

A simplified vacuum arc design [based on metal vapor vacuum arc (MeVVA) concepts] is employed as a plasma source for a study of a (7)Be non-neutral plasma. The design includes a mechanism for interchanging the cathode source. Testing of the plasma source showed that it is capable of producing on the order of 10(12) charges at confinable energies using a boron-carbide disk as the cathode target....

Pure Metal and Metal-doped Rare-gas Clusters Grown in a Pulsed Arc Cluster Ion Source

The performance of a new pulsed arc cluster ion source (PACIS) is demonstrated for pure metal cluster ions and anions as well as mixed metal-rare-gas clusters. Pure metal clusters like W$ exhibit intensity distributions similar to those from laser vaporization sources. The ion current of the PACIS is comparable to that of a laser vaporization source. For metal-doped argon cluster ions, a single...

Ion energy distribution functions of vacuum arc plasmas

Coating Deposition Using Vacuum Arc and Ablation Metal Plasma

An innovative concept in the development of advanced coating deposition and ion implantation method including an application of filtered DC metal plasma or ablation plasma and highfrequency short-pulsed negative bias voltage with a duty factor in the range 10–99% are considered. It was shown that plasma based ion implantation as well as ion-assisted coating deposition may be realized for metal ...